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Research Unveils Measurement Errors in Nanolaminate Dielectric Constant

1/20/2026

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Story summary
  • Researchers found that the reported giant dielectric constant in aluminum oxide/titanium oxide nanolaminates resulted from leakage-related measurement errors.
  • Atomic-scale defects allowed electrons to escape, making the nanolaminate appear solid.
  • The team traced the issue to insufficient aluminum in the aluminum oxide layers.
  • Changing the oxygen source from water to ozone during deposition eliminated leakage paths and yielded a true insulator even below one nanometer.
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