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ASML Doubles EUV Power, Promises 50% Chip Output Boost

2/23/2026

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Summary

Story summary

ASML Holding, the Netherlands-based maker of EUV lithography machines, says EUV power rose to 1,000 watts from 600.
The higher power could boost chip output by 50% by 2030, to about 330 wafers per hour from 220.
The increase comes from doubling molten tin droplets and using two laser beams for shaping.
ASML plans to lower customer costs and may raise power to 1,500–2,000 watts later.

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Story summary

ASML Holding, the Netherlands-based maker of EUV lithography machines, says EUV power rose to 1,000 watts from 600.
The higher power could boost chip output by 50% by 2030, to about 330 wafers per hour from 220.
The increase comes from doubling molten tin droplets and using two laser beams for shaping.
ASML plans to lower customer costs and may raise power to 1,500–2,000 watts later.