EPA Fast-Tracks PFAS for Semiconductors

In early December, the EPA announced a rule to review new PFAS for semiconductor manufacturing in 90 days—one-third the review time for other sectors. The rule, issued under the 2016 TSCA revision, also permits low-volume exemptions that let chemicals enter the market within 30 days when used in small amounts. The policy aligns with Biden administration’s incentives to expand chip production.

The Guardian

The 2016 TSCA amendment closed a loophole that let firms sell chemicals without EPA review if they posed no immediate worker risk. Over 600 PFAS have since received low-volume exemptions, some described as “lethal if inhaled.” Semiconductor fabs use PFAS in 1,000 steps, prompting industry lobbying for faster approvals to support growth in defense, medical and clean-energy technologies.

The Guardian

• The PFAS class includes roughly 15,000 chemicals; a chip plant measured 78,000 ppt PFAS in wastewater, far above the EPA’s 4-ppt limit for several PFAS.

The Guardian

• Fluorinated PFAS gases can convert to trifluoroacetic acid (TFA), a greenhouse gas persisting up to 1,000 years.

The Guardian

EPA administrator Michal Freedhoff said the agency “has modernized our chemical reviews and continued to protect people from unsafe new PFAS.” The EPA also asserts that PFAS in semiconductor facilities operate in a “closed loop,” keeping the substances contained and safely disposed of. It says the rule balances innovation with public-health safeguards.

The Guardian

Critics argue accelerated timeline undermines scientific review. Mike Belliveau, founder of Bend The Curve, warned PFAS pollution is rising and disputed the closed-loop claim. Earthjustice attorney Tosh Sagar criticized the EPA’s reliance on industry data and “standardized formulas… designed to get them to ‘yes.’” Lenny Siegel of Chips Communities United called lack of safety data “innocent until proven guilty” and demanded transparency.

The Guardian

Investigations show semiconductor plants discharge PFAS-laden waste into water and air. Some incinerators cannot fully destroy PFAS, causing atmospheric emissions. Testing found PFAS levels far above regulatory limits in wastewater, and TFA formation adds a climate hazard.

The Guardian

The EPA’s “closed loop” claim conflicts with observed PFAS releases. Health and safety data remain confidential, limiting public scrutiny. The EPA’s revised PFAS definition also excludes several fluorinated gases that health agencies classify as PFAS.

The Guardian

• “Today, we’ve modernized our chemical reviews and continued to protect people from unsafe new PFAS,” — Michal Freedhoff, EPA Chemical Safety Administrator

The Guardian

• “There is no closed system for PFAS,” — Mike Belliveau, Founder, Bend The Curve

The Guardian

• “It’s innocent until proven guilty and that’s a fundamental problem,” — Lenny Siegel, Chips Communities United

The Guardian

The rule will apply as semiconductor fabs expand under incentives. Industry is pursuing PFAS alternatives, and watchdog groups call for congressional oversight of the EPA’s expedited review.

The Guardian