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US Accuses ASML of EUV Machine Leak to China; Company Denies

6/20/2026, 1:25:35 AM

US Concerns Over Potential ASML EUV Machine in China

U.S. Commerce Secretary Howard Lutnick told senior ASML executives that Washington believes a top-tier extreme ultraviolet (EUV) lithography system may have reached China, violating export controls that have barred EUV sales since the first Trump administration. Officials say they have evidence of EUV-related components and transport equipment shipped to China, but have not released it.

Export Controls, EUV Monopoly & Legislative Push

EUV lithography is the only way to make the most advanced chips; ASML of the Netherlands is the sole supplier, operating about 314 machines worldwide, none officially in China. U.S. and allied export rules forbid EUV sales to Chinese entities. A bipartisan bill would also ban ASML’s deep-ultraviolet (DUV) tools, which generate roughly 20 % of its projected 2026 revenue.

Key Actors & Numbers

Howard Lutnick (U.S. Commerce Secretary), Christophe Fouquet (ASML CEO), the Dutch foreign ministry, U.S. Ambassador Joe Popolo, chip-tool makers Lam Research, KLA, Applied Materials, and startup xLight (up to $150 million funding). ASML’s market value is near $700 billion; each EUV scanner weighs 180 tons, contains ~100 000 parts, and is the size of a school bus.

Official Statements & Responses

ASML said it has never shipped an EUV machine or any EUV-specific component to China, emphasized its transparent dialogue with governments, and affirmed its commitment to comply with U.S. and Dutch export regulations. The Dutch foreign ministry affirmed that export-controlled equipment requires a licence and is strictly enforced. U.S. officials claim evidence of shipments but have not disclosed it.

Criticism & Opposition

Lam Research, KLA and Applied Materials say the alleged breach puts them at a competitive disadvantage. U.S. officials accuse ASML of prioritising profit over security and of supporting Chinese firm SwaySure. Critics note the Commerce Department’s $150 million investment in xLight, a potential challenger to ASML’s EUV monopoly.

Conflicting Reports & Gaps

The U.S. says it has evidence of EUV-related shipments, yet no documentation has been released. ASML’s internal tracking and a presentation titled “No indication of any ASML EUV System in China” list all 314 machines and assert none are in China. Independent verification of either claim is lacking.

Verbatim Quotes

  • “ASML has never shipped an EUV machine to China nor have we shipped to China any component, module or equipment specially designed to be used in an EUV machine.” — ASML spokesperson
  • “ASML regularly engages in transparent and open dialogue with government leaders globally,” — ASML spokesperson
  • “All equipment, components and technology that explicitly fall under these rules require a licence,” — Dutch Ministry of Foreign Affairs

What’s Next

The bipartisan bill could extend the export ban to all ASML DUV tools, potentially cutting 20 % of projected 2026 revenue. The U.S. has not taken a formal stance, but senior officials keep pressing ASML while trade-deal talks may ease pressure.