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China Begins Domestic Production of Immersion DUV Lithography Machines

7/28/2026, 8:50:09 AM

Core Development

On July 27, a Reuters report said China has started manufacturing its own immersion deep-ultraviolet (DUV) lithography machines, a critical tool for advanced chip fabrication that has long been supplied almost exclusively by Dutch firm ASML. The Information, citing sources familiar with the project, indicated that the first units are slated for delivery this year to major Chinese chipmakers — Semiconductor Manufacturing International Corp, Hua Hong Semiconductor and ChangXin Memory Technologies. ASML declined to comment when approached by Reuters.

Background and Context

Immersion DUV lithography is essential for producing the most advanced semiconductor nodes, and ASML’s machines have underpinned the global chip industry for over a decade. China’s push to develop a domestic alternative reflects a broader strategy to reduce reliance on foreign equipment amid ongoing trade tensions and export controls that have limited Chinese access to high-end chipmaking tools.

Immediate Market Reaction

The news triggered a sharp sell-off in equities linked to the lithography supply chain. Reuters noted that ASML’s shares fell more than 7%, marking the company’s worst trading day since June 8. Shares of BE Semiconductor Industries dropped about 8.5%, while Soitec fell 5% and Infineon Technologies slipped nearly 3%, underscoring investor concerns about a potential shift in the equipment market.

Official Statements & Responses

ASML’s refusal to comment left its official stance unclear. The Chinese firms slated to receive the new machines have not issued public statements about the rollout. Market analysts referenced in the Reuters piece suggested the development could intensify competition but stopped short of forecasting specific market outcomes.

Implications for the Global Chip Supply Chain

If China’s domestically produced immersion DUV tools meet performance expectations, they could lessen the country’s dependence on ASML and alter the dynamics of the global semiconductor equipment market. However, the immediate impact appears limited to short-term stock volatility, and the long-term effect on chip design, manufacturing capacity, and international trade relationships remains to be seen.